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CS-L

Sputtering System

Compact Sputter for Research & Development
CS-L

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cs-l

It is possible to arrange for various module conbination; Atmospheric cassette, Single piece, Atmospheric transfer, Vaccum transfer. Compact design integrated with control unit.

Features

  • CS-L is suitable to various development testing. The system is controlled by the touch panel for the sputtering  deposition, ultra high vacuum and substrate transfer.
  • Applications

    • Reserch & development

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