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SV Series

Sputtering System

Batch-type Sputtering Systems
SV Series

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Vertical batch-type sputter systems. Series models include the SV-200 disk stamper model, and carousel types for large-volume substrate processing.

Features

  • SV-4540, 6040 and 9045 are carousel types that can load a large volume of substrates. They are ideal for small- to medium-scale production, or for low-volume production of many different substrate types.
  • SV-200 is a system specialized for disk stamper Ni deposition. It features an ultra-compact design, fully-automatic operation and high throughput.

Applications

  • Deposition of electrode films, insulating films or dielectric films on various substrates

Specifications

SV-200 SV-4540 SV-6040 SV-9045
Standard evacuation system 8-inch cryopump 12-inch cryopump 12-inch cryopump 16-inch cryopump
Final pressure 6.7e-5Pa 6.7e-5Pa 6.7e-5Pa 6.7e-5Pa
Deposition direction Side Side Side Side
Deposition area uniformity Static Rotary φ200mm ± 5% L300mm ± 10% L300mm ± 10% L400mm ± 10%
Substrate heating None 250°C 250°C 250°C
Control system Automatic Automatic Automatic Automatic
 
Options (except SV-200) Turbo pump Drainage cold electrode
Oil diffusion pump APC mechanism
Simultaneous multi-source deposition Substrate reversing mechanism
Down deposition Reactive sputter
Conventional cathode
Cathode for strong magnets
RF etch cleaning (SV-4540)
Bias mechanism (SV-4540)

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