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Sputtering System

ULVAC’s sputtering systems have the best track record in the industry.
“Feature story : Flat Panel LCD TVs and Vacuum”

Holizontal In-line Type Sputtering System
SCH Series


The SCH Series are horizontal in-line sputtering systems for deposition of transparent conductive films and other metal films. They can be used to depositi films such as back conatct and barrier layers in solar cell production lines.

Multi Chamber Type Equipment


ENTRON N300 is the cluster type deposition system which equipped the process technology of next generation semiconductor. It offers the critical process of the next-generation semiconductor, such as “Cu Barrier Seed PVD for TSV”, “Aluminum Emitter Wiring PVD for Large Diameter Substrate Power Devices”, and “Aluminum Re-Distribution Layer PVD and Under Bump Metal PVD for High-Density Packaging”. Furthermore, all user will satisfied by the most environmentally-friendly concept as an aggregate of energy-saving technologies in ENTRON-series. 

Sputteing System for Optical Filters and Coating
ULDiS Series


The ULDiS series is the digital sputtering system that has enhanced the Meta Mode and realized the high-quality optical filters and coatings.

ULVAC has signed a License Agreement with JDS Uniphase Corporation of the U.S.

; License MetaMode® sputter for optical application. The ULDiS comes available to be placed at your business, and develops widely.

Batch-type Sputtering System
SX Series


Batch-type Sputtering System SX series is for batch type sputtering system for research & development and small production application.

Backside Metalization Sputtering System
SRH Series


SRH Series is production system for deposition of metallic films for power device, WL-CSP, or UBM or similar application.

Sputtering Coating Machine (Roll Coater Type)
SPW Series


SPW Series is a equipment that can be sputtered optical thin film and metal etc multilayer film on plastic film.

Gas separation chanber for batch processing of high-function multilayer films.

Single-substrate Sputtering Systems
SMD Series / SMD-X Series


The SMD Series are single-substrate sputtering systems for deposition of films such as metal films and ITO films. ULVAC has delivered a large number of these systems, for use in a wide range of production environments. ULVAC responds rapidly to feedback from production sites to improve the reliability of these models.

With the increase in size of LCD panels and manufacturing mother glass, manufacturing equipment has also become larger, requiring ever-larger equipment investments. For the past several years, ULVAC has been responding to increasing mother glass sizes by developing new-concept systems to replace the cluster-type systems currently prevalent. ULVAC's systems support larger substrate sizes while remaining compact and low-priced. The new concepts they employ enable staggered, highly effective investment with low initial outlay.

In-line Sputtering Systems
STD Series


The STD Series are in-line sputtering systems for deposition of ITO films and other metal films. They can be used to deposit films such as low-resistance ITO films, transparent conductive films, and multilayer optical film for touch panel metal wire films.

Compact Sputter for Research & Development


It is possible to arrange for various module conbination; Atmospheric cassette, Single piece, Atmospheric transfer, Vaccum transfer. Compact design integrated with control unit.

Compact Sputter


Compact sputtering system is available for research and development of multi layer thin film, compound materials or other devices, using automatic process operation by PC. Also more large size substrate (4 inch dia.) than ever system is available.

Ultra-High Vacuum Sputtering System for R&D
MPS Series


ULVAC's MPS Series are a new type developed using our wealth of experience and extensive sales record. Discharge can be maintained at a pressure, about one order of magnitude lower than the conventional sputter discharge pressure. The use of long throw sputtering enables better film thickness uniformity, and the diagonal incidence configuration is ideal for co-sputter and multilayer films.

Load-lock type Sputtering System
SPH Series


Load-lock sputtering system suitable to fully automated production line for small size parts such as automotive mirrors and plastic moldings. Lineups are SPH-320/320M for 2 stage processing and SPH340M for 4 stage processing.

Multi-chamber Sputtering System


MLXTM-3000N meets customer's complicated requests by superior process flexibility and controllability, and excellent cost performance.

Multi-chamber Sputtering System


Multi-chamber Sputtering System ENTRONTM-EX2 W300 is the latest platform possible to combine the various process.

The high-end model with extendibility that can be correspond with customer’s demand of high throughput and saving energy, etc. for next generation. ULVAC will answer customer's needs by various lineup like the high advanced PVD, CVD and ALD module for nano wiring by our original technology.

Batch-type Sputtering Systems
SV Series


Vertical batch-type sputter systems. Series models include the SV-200 disk stamper model, and carousel types for large-volume substrate processing.

Load-lock type Sputtering System


Load-lock type Sputtering System CS 200 is for research & development and small production application.

Cluster-type Sputtrering System


SME-200E is cluster type Sputtering system for research and development and production purpose.

Magnetic Multilayer Cluster Tool
MagestTM S200


MagestTM S200 provides the multi-layer deposition of ultra thin films under the ultra high vacuum condition and is applicable for the deposition of various materials by RF or DC sputtering.

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