This system is a single-substrate laser scribing system that is used to remove the transparent electrode (TCO) films formed on the glass substrate by the laser ablation method using the near-infrared wavelength pulse oscillating laser.
This system consists of 6 IR lasers, 6 sets of laser light collection optical system, bridge type XY stage (X-axis: lower axis, Y-axis: upper axis on bridge), substrate conveyor mechanism, dust collector, laser power measuring instrument and control systems. It is achieved high accuracy and high stability for using fiber lasers and a stage made of granite.
|Substrate material||W1400 x D1100 x t=3-5mm|
|Tact time||< 90 sec. (ULVAC standard pattern)|
|Laser wavelength||About 1.06μm|
|Beam delivery||Optical Fiber|
|Beam shape||About 50-70μm circle|
|Number of beams||Air cooling|
|Stage size||W2420mm x L4570mm x H2100mm|
|Valid stroke||X axis(upper axis): 2000mm
Y axis(lower axis): 1260mm
Z axis(mounted on Y stage): 50mm
|X-Y orthogonality||Below 5μm/500mm|
|Accuracy of repeatability positioning||Below +/-10μm|