ULDEX-1600 features surface texturing formation on silicon wafers for solar cell, with introduced etching gas and high-frequency power. Low-reflecting surface texturing formation leads to improvement of solar cell light absorption performance and cell efficiency.
|Wafer size (mm)||□156|
|Wafer per tray (□156mm)||100pcs.|
|Chamber configuration||1) Process chamber||2|
|2) Wafer transfer unit||Option|
|Throughput(pcs./hr)||4000 (standard ULVAC conditions)|