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ULDEX-1600

Batch Type Dry Etching System
ULDEX-1600

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ULDEX

ULDEX-1600 features surface texturing formation on silicon wafers for solar cell, with introduced etching gas and high-frequency power. Low-reflecting surface texturing formation leads to improvement of solar cell light absorption performance and cell efficiency.

uldex_texturing

 

Features

  • High throughput: 4000pcs./hr
  • Simple mechanism: No driving system inside the process chamber.
  • Simple maintenance.

Applications

  • Mono-Crystalline Wafer
  • Multi-Crystalline Wafer
  • Monolike-Crystalline Wafer

Specifications

  ULDEX-1600
Wafer size (mm) □156
Wafer per tray (□156mm) 100pcs.
Chamber configuration 1) Process chamber 2
2) Wafer transfer unit Option
Throughput(pcs./hr) 4000 (standard ULVAC conditions)

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