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Others

ULVAC solutions range from vacuum technology-based services to analysis services and after-sales services.

TCO Laser Scribing System
ULT-1400

ULT

This system is a single-substrate laser scribing system  that is used to remove the transparent electrode (TCO) films formed on the glass substrate by the laser ablation method using the near-infrared wavelength pulse oscillating laser.
This system consists of 6 IR lasers, 6 sets of laser light collection optical system, bridge type XY stage (X-axis: lower axis, Y-axis: upper axis on bridge),  substrate conveyor mechanism, dust collector, laser power measuring instrument and control systems. It is achieved high accuracy and high stability for using fiber lasers and a stage made ​​of granite.

Batch Type Dry Etching System
ULDEX-1600

ULDEX

ULDEX-1600 features surface texturing formation on silicon wafers for solar cell, with introduced etching gas and high-frequency power. Low-reflecting surface texturing formation leads to improvement of solar cell light absorption performance and cell efficiency.

uldex_texturing

 

Drying Furnace
AMF-1000 ACF-500 ASF-500

kansouro_e

ULVAC drying furnace is well-suited to recovery treatment of inner parts such as for vapor deposition system, color filter pretreatment, and degassing process in HV to UHV low pressure environment.
Use for degassing process after washing of semiconductor components UHV outer gas furnace for SEM parts.
Recovery treatment of inner parts such a s for vapor deposition system, Color filter pretreatment.

Outgas Measuring Instrument
TDS-2001

tds-2001

The Model TDS-2001 is an outgas analyzer for small samples and finds application is a wide variety of fields, such as semiconductor process, display, and others. Best suited to development of new materials.

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