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> Dry Etching System for R&D
NLD-570
Etching System
Dry Etching System for R&D
NLD-570
Dry etching system with ULVAC original NLD (Neutral Loop Discharge) Plasma Source.
Features
Low process pressure, high density plasma, low electron temperature are perfect for quartz glass, Pyrex, LN, LT etc.
Good profile control and surface roughness.
Good performance of deep SiO
2
etching with PR.
High etching rate of Quartz > 1μm/min, Pyrex > 0.8 μm/min.
Excellent uniformity control.
Cassette chamber is selectable as an option.
Applications
Optical Devices (Wave guide, amplifier, optical switch etc), Micro lens, Photonics, μ-TAS etc.
PRODUCT CATEGORY
Sputtering System
CVD System
Vacuum Evaporation System
Vapor Deposition Polymerization System
Ashing System
Etching System
Ion Implantation System
Vacuum Furnace
Roll Coater
Freeze Drying / Vacuum Drying System
Vacuum Distillation System
Automatic Leak Tester
Others
APPLICATIONS
Semiconductor Process (FEOL/BEOL)
Native Oxide Removal
Sputtering
CVD/ALD
Semiconductor Process (Non Volatile Memory)
Sputtering/CVD
Etching
LED Device
Etching
Ashing
Sputtering
Evaporation
PE-CVD
Power Device
Front-Side
Etching
Ashing
Ion Implant
Sputtering
Back-Side
Ion Implant
Sputtering
Evaporation
Advanced Packaging Device
TSV
Etching
Ashing
PE-CVD
Sputtering
CSP
PE-CVD
Sputtering
MEMS Device
Etching
Ashing
Sputtering
Evaporation
CVD
Development Prototype
Optical Film
Etching
Sputtering
Evaporation
CVD
Magnetic Device
Sputtering
Evaporation
Etching
Thin-film Lithium Ion Secondary Battery
Sputtering
Evaporation
Vapor Deposition Polymerization
LCD
Array Process
Sputtering
Evaporation
CVD
Color Filter Process
Sputtering
Evaporation
OLED
Sputtering
CVD
Evaporation
Touch Panel
Glass substrate
Sputtering
CVD
Evaporation
Flexible Substrate
Sputtering Roll Coater
Evaporation
R&D Equipment for Display
Sputtering
CVD
Evaporation
Photovoltaic
Thin film solar cell
Sputtering
CVD
Others
Evaporation
Crystalline silicon solar cell
Sputtering
CVD
Compound semiconductor solar cell/Others
Sputtering
R&D
Sputtering
CVD
Evaporation
Magnet
Rare Earth Magnet
Sintering
Aging
Automobile Parts
Window Coating
CVD
Mirror
Sputtering
Heat exchanger
Brazing
Leak Detection
Cam parts, Gear parts
Heat Treatment
Sintering
Wheel Coatings
Sputtering
Magnet
Capacitors
Power Device
Wiring Materials
Flexible Printed Circuits
Evaporation
Capacitors
Film capacitor
Evaporation
Ta Capacitor
Sintering
Packaging Materials
Food Packaging
Evaporation
Leak Detection
Barrier Packaging
Evaporation
Leak Detection
Decorative Coating
Metallic Yarn
Evaporation
In-Mold Decoration Film Insert Decoration
Evaporation
Pharmaceutical
Active pharmaceutical ingredient
Drying
Distillation
Drag Intermediate
Drying
Distillation
Solid preparation/Injection (sterile product)/Reagent
Drying
Food Processing
Health food/Food additive/Edible fat and oil
Distillation
Dried food
Drying
Health Care
Cosmetic materials/ Health supplement materials
Distillation
Electronics Materials
Mold materials/ Resist materiasl/ Lubricant
Distillation
Polymer material
Drying
Distillation
Ceramics/Metal powder
Drying
Functional Materials
Shape memory alloy
Induction Melting
Aviation
Airplane Parts
Heat Treatment
Brazing
Power Transmission
Vacuum Circuit Breaker
Sintering
Brazing
Film Capacitor
Evaporation
Home Appliance
Vacuum Thermos
Brazing
Heat Exchangers for Hot-Water Supply Machine
Brazing
Leak Detection
Heat Exchangers for Air-Conditioners
Brazing
Leak Detection
Compressors for Air-Conditioners
Brazing
Leak Detection