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CCV Series

In-line Type PE-CVD System
CCV Series

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CCV

CCV series are vertical type CVD systems for deposition of a-Si. 30 years experience with key players. Isolated deposition camber and low deposition rate offers the high-quality film.

Features

  • The Experience and Reliability :
     30 years experience with key players.
     Demonstrated system reliability "Mass-production" field.
  • Superior efficiency :
     Low deposition rate.
     Isolated deposition chamber.
  • Low running cost : No use of NF3.
  • High throughput :  Two substrate per carrier.

Applications

  • Thin-film solar cell

Specifications

Model CCV-1400-12 CCV-1400-16
substarate size(mm) 1100×1400×t4 1100×1400×t4
Chamber configuration 1) Loading・Heatting chambers 1
2) Heating chambers 1 2
3) Reaction chambers 9 12
4) Unloading chambers 1
5) Evacuation system DRP+MBP
6) Substrate transfer unit Robot
7) Return transfer unit Return convyer
Productivity 180sec/pcs. (Standard ULVAC conditions) 90sec/pcs. (Standard ULVAC conditions)
Heating temperature 200ºC

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