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Ashing System

ULVAC offers environmentally-friendly (no solutions are needed), high-productivity technologies for resist removal, which is essential in production processes for electronic and semiconductor devices.

Ashing Systems
Luminous NA Series

NA-1300L full module

Luminous NA series ashing systems can be used for all sizes of wafers and are compatible with a wide range of processes from critical processes for next generation wafers to wafer level packaging processes.

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