EQUIPMENT

Top > EQUIPMENT > APPLICATIONS > Thin-film Lithium Ion Secondary Battery >

Thin-film Lithium Ion Secondary Battery

ULVAC offers integrated production technologies for advanced secondary batteries developed for use in small electronic devices and biomedical devices and in combination with energy harvesting devices.

Sputtering

Batch-type Sputtering System
SX Series

sx-200

Batch-type Sputtering System SX series is for batch type sputtering system for research & development and small production application.

Compact Sputter for Research & Development
CS-L

cs-l

It is possible to arrange for various module conbination; Atmospheric cassette, Single piece, Atmospheric transfer, Vaccum transfer. Compact design integrated with control unit.

Load-lock type Sputtering System
CS-200

CS200

Load-lock type Sputtering System CS 200 is for research & development and small production application.

Cluster-type Sputtrering System
SME-200E

sme200e

SME-200E is cluster type Sputtering system for research and development and production purpose.

Evaporation

Evaporation Roll Coater
EW Series

EWE-060

EW Series models are deposition systems for evaporation of metal or oxides onto continuously-wound plastic film, paper or metal foil. Models range from compact types for research, to systems for mass-production. They can be used to manufacture products such as packaging materials, capacitors and magnetic tape.

Small Evaporation System for R&D
EX-200

EX_200

This is an evaporation system for R&D use for the deposition of metal films and oxide films by using an EB gun and resistance heating evaporation sources.

Load-lock type Evaporation System
CV-200

cv200

CV-200 consists of two chambers; a load-lock chamber and an evaporation chamber. Employing the load-lock type system enables the process to be carried out in a constantly clean environment. It also provides superior film repeatability. Application ranges from R&D use to small production.

Batch-type High Vacuum Evaroration System
ei Series

ei

This is a batch type high vacuum evaporation system for the deposition of metal and oxide on a substrate. Since the operation panel of this system has an integrated control function that realizes automated vacuum and deposition process, it is recommended for R&D use as well as for small-scale manufacturing.

Organic Material Evaporation System for R&D
Mini-Lab

mini_lab

This is a load-lock type material evaporation system for R&D use which deposits organic films, alkali metal films and metal films.

Vapor Deposition Polymerization

Organic/Inorganic Compound Deposition Systems
VEP Series

vep

VEP Series models are systems for deposition of various organic and inorganic materials by methods including evaporation, sputtering, plasma metallization and evaporation metallization. Process chambers can be freely selected to match the application.