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CVD/ALD

Multi-chamber Sputtering System
ENTRONTM-EX2 W300

entron_ex2w300

Multi-chamber Sputtering System ENTRONTM-EX2 W300 is the latest platform possible to combine the various process.

The high-end model with extendibility that can be correspond with customer’s demand of high throughput and saving energy, etc. for next generation. ULVAC will answer customer's needs by various lineup like the high advanced PVD, CVD and ALD module for nano wiring by our original technology.

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