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IH-860DSIC

Ion Implantation System

High-temp Ion Implanter for SiC
IH-860DSIC

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ih860dsic

Ion Implanter for mass production with high temp ESC for SiC.

Features

  • Continuous high-temp implantation
  • Up to 700keV
  • Chain implantation by software
  • Small footprint
  • From R&D to mass production

Applications

  • SiC devices

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