Vacuum Evaporation System
Small Evaporation System for R&D
This is an evaporation system for R&D use for the deposition of metal films and oxide films by using an EB gun and resistance heating evaporation sources.
- SUS chamber, compact.
- Resistance heating evaporation sources (supports up to six sources) which can be chosen with an EB gun.
- Diffusion pump, turbo-molecular pump and cryopump are available.
- Substrate heating mechanism, simultaneous deposition and revolved deposition are available.