Vacuum Evaporation System
Small Evaporation System for R&D
EX-200
This is an evaporation system for R&D use for the deposition of metal films and oxide films by using an EB gun and resistance heating evaporation sources.
- SUS chamber, compact.
- Resistance heating evaporation sources (supports up to six sources) which can be chosen with an EB gun.
- Diffusion pump, turbo-molecular pump and cryopump are available.
- Substrate heating mechanism, simultaneous deposition and revolved deposition are available.
- Various R&Ds
- PRODUCT CATEGORY
- APPLICATIONS
- Semiconductor Process (FEOL/BEOL)
- Semiconductor Process (Non Volatile Memory)
- LED Device
- Power Device
- Advanced Packaging Device
- MEMS Device
- Optical Film
- Magnetic Device
- Thin-film Lithium Ion Secondary Battery
- LCD
- OLED
- Touch Panel
- R&D Equipment for Display
- Photovoltaic
- Magnet
- Automobile Parts
- Wiring Materials
- Capacitors
- Packaging Materials
- Decorative Coating
- Pharmaceutical
- Food Processing
- Health Care
- Electronics Materials
- Functional Materials
- Aviation
- Power Transmission
- Home Appliance