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Holizontal In-line Type Sputtering System
SCH Series


The SCH Series are horizontal in-line sputtering systems for deposition of transparent conductive films and other metal films. They can be used to depositi films such as back conatct and barrier layers in solar cell production lines.

Sputtering Coating Machine (Roll Coater Type)
SPW Series


SPW Series is a equipment that can be sputtered optical thin film and metal etc multilayer film on plastic film.

Gas separation chanber for batch processing of high-function multilayer films.

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