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Crystalline silicon solar cell

Sputtering

Holizontal In-line Type Sputtering System
SCH Series

SCH

The SCH Series are horizontal in-line sputtering systems for deposition of transparent conductive films and other metal films. They can be used to depositi films such as back conatct and barrier layers in solar cell production lines.

CVD

In-line Type PE-CVD System
CCV Series

CCV

CCV series are vertical type CVD systems for deposition of a-Si. 30 years experience with key players. Isolated deposition camber and low deposition rate offers the high-quality film.