The ULDiS series is the digital sputtering system that has enhanced the Meta Mode and realized the high-quality optical filters and coatings.
ULVAC has signed a License Agreement with JDS Uniphase Corporation of the U.S.
; License MetaMode® sputter for optical application. The ULDiS comes available to be placed at your business, and develops widely.
ULVAC's MPS Series are a new type developed using our wealth of experience and extensive sales record. Discharge can be maintained at a pressure, about one order of magnitude lower than the conventional sputter discharge pressure. The use of long throw sputtering enables better film thickness uniformity, and the diagonal incidence configuration is ideal for co-sputter and multilayer films.