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CVD
Cluster-type PE-CVD System
CME-200E/400/500
CME-200E/400 is the most suitable model in the PE-CVD series production system for deposition of Si films with application as Insulator or barrier layers.
Load-lock type Plasma-CVD System
CC-200/400
CC-200/400 is a compact and easy-to-use system for R&D use and production.
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