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OLED

ULVAC offers integrated production technologies—ranging from pretreatment to deposition and sealing—for the production of OLED, a rapidly growing market.
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>>Development of the“ CEE-950” Thin Film Encapsulation Equipment for OLEDs

Sputtering

Sputtering Coating Machine (Roll Coater Type)
SPW Series

SPW165

SPW Series is a equipment that can be sputtered optical thin film and metal etc multilayer film on plastic film.

Gas separation chanber for batch processing of high-function multilayer films.

Single-substrate Sputtering Systems
SMD Series / SMD-X Series

smd

The SMD Series are single-substrate sputtering systems for deposition of films such as metal films and ITO films. ULVAC has delivered a large number of these systems, for use in a wide range of production environments. ULVAC responds rapidly to feedback from production sites to improve the reliability of these models.

With the increase in size of LCD panels and manufacturing mother glass, manufacturing equipment has also become larger, requiring ever-larger equipment investments. For the past several years, ULVAC has been responding to increasing mother glass sizes by developing new-concept systems to replace the cluster-type systems currently prevalent. ULVAC's systems support larger substrate sizes while remaining compact and low-priced. The new concepts they employ enable staggered, highly effective investment with low initial outlay.

CVD

Single-substrate Plasma CVD Systems
CMD Series

cmd

The CMD Series are single-substrate CVD systems for deposition of silicon oxide and nitride films using SiH4 or TEOS. A high-frequency (27.12 MHz) power supply enables high-quality film deposition.

Evaporation

Organic EL Manufacturing Systems
SOLCIET, SATELLA, NEW-ZELDA

oled

A complete lineup including a research system for materials development, a cluster system for low-volume production, and an in-line system for mass-production. The lineup supports a complete range of organic EL applications, with systems for micromolecular materials and systems for macromolecular organic materials.

Evaporation Roll Coater
EW Series

EWE-060

EW Series models are deposition systems for evaporation of metal or oxides onto continuously-wound plastic film, paper or metal foil. Models range from compact types for research, to systems for mass-production. They can be used to manufacture products such as packaging materials, capacitors and magnetic tape.