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Batch-type Sputtering System SX series is for batch type sputtering system for research & development and small production application.
SRH Series is production system for deposition of metallic films for power device, WL-CSP, or UBM or similar application.
It is possible to arrange for various module conbination; Atmospheric cassette, Single piece, Atmospheric transfer, Vaccum transfer. Compact design integrated with control unit.
Compact sputtering system is available for research and development of multi layer thin film, compound materials or other devices, using automatic process operation by PC. Also more large size substrate (4 inch dia.) than ever system is available.
MLXTM-3000N meets customer's complicated requests by superior process flexibility and controllability, and excellent cost performance.
Load-lock type Sputtering System CS 200 is for research & development and small production application.
SME-200E is cluster type Sputtering system for research and development and production purpose.
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