Vacuum Evaporation System
Organic Material Evaporation System for R&D
This is a load-lock type material evaporation system for R&D use which deposits organic films, alkali metal films and metal films.
- Load-lock type vacuum evaporation system consisting of transfer chamber and deposition chamber.
- Enabling the deposition of organic, alkali metal and metal films.
- Deposition methods using either rotation, index or mask sliding mechanism are available.
- Deposition with mask and mask exchange mechanism are available. Process needed for organic material evaporation can be done in one batch.
Organic material system for R&D use