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Mini-Lab

Vacuum Evaporation System

Organic Material Evaporation System for R&D
Mini-Lab

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mini_lab

This is a load-lock type material evaporation system for R&D use which deposits organic films, alkali metal films and metal films.

Features

  • Load-lock type vacuum evaporation system consisting of transfer chamber and deposition chamber.
  • Enabling the deposition of organic, alkali metal and metal films.
  • Deposition methods using either rotation, index or mask sliding mechanism are available.
  • Deposition with mask and mask exchange mechanism are available. Process needed for organic material evaporation can be done in one batch.

Applications

Organic material system for R&D use

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