EQUIPMENT

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ULVAC's base technology with vacuum technology at its core and related peripheral technologies have been combined through many years of R&D and improvements in manufacturing technology, enabling us now to deliver a very wide range of industrial manufacturing equipment for semiconductors, electronic parts, FPD, solar cells, and others.

What's New

2015/3/24
EQUIPMENT
  • Sputtering System
  • CVD System
  • Vacuum Evaporation System
  • Vapor Deposition Polymerization System
  • Ashing System
  • Etching System
  • Ion Implantation System
  • Annealing System
  • Vacuum Furnace
  • Roll Coater
  • Freeze Drying/Vacuum Drying
  • Vacuum Distillation System
  • Automatic Leak tester
  • Others