YTP Series version B is a high vacuum pumping system with a ceramic ball bearing turbo molecular pump.Vacuum pumping from atmospheric pressure to high vacuum is possible. ULVAC prepares two types, SA type which allows the automatic pumping by START / STOP switch and M type which is a manual operation. In addition, the back pump can be selected from rotary pump as a standard specification, or dry scroll pump as the other selection.
■ Preparing various models according to the application
The back pump can be selected from rotary pump as a standard specification, or dry scroll pump as the other selection.
■ Adopting a superior power failure countermeasure function
A solenoid valve is equipped as standard on the fore valve to prevent reverse flow and failure at power failure.
■ Possible to check the condition of rough vacuum pump
Possible to check the pressure during rough vacuum pumping due to the Pirani vacuum gauge is equipped as a standard parts.
■ Vacuum pumping to the Ultra High Vacuum area is possible
The installation of optional baking heater allows the pumping to the Ultra High Vacuum area by degassing function.
(※ As product specification value)
■Evacuation system from atmospheric pressure to high vacuum
■Evacuation system of various experiment and R&D equipments
■Vacuum substitution of high purity gas
■Roughing evacuation system of UHV system
■Evacuation system of analytical equipment