• EQUIPMENT
• COMPONENTS
• MATERIALS
• CUSTOMER SUPPORT
• DOWNLOAD

• Contact
• Cautions on use
• Site Map
• Link Policy

EQUIPMENT

• PRODUCT CATEGORY
  • Sputtering System
  • CVD System
  • Vacuum Evaporation System
  • Vapor Deposition Polymerization System
  • Ashing System
  • Etching System
  • Ion Implantation System
  • Vacuum Furnace
  • Roll Coater
  • Freeze Drying / Vacuum Drying System
  • Vacuum Distillation System
  • Automatic Leak Tester
  • Others

EQUIPMENT

• APPLICATIONS
  • Semiconductor Process (FEOL/BEOL)
    • Native Oxide Removal
    • Sputtering
    • CVD/ALD
  • Semiconductor Process (Non Volatile Memory)
    • Sputtering/CVD
    • Etching
  • LED Device
    • Etching
    • Ashing
    • Sputtering
    • Evaporation
    • PE-CVD
  • Power Device
    • Front-Side
      • Etching
      • Ashing
      • Ion Implant
      • Sputtering
    • Back-Side
      • Ion Implant
      • Sputtering
      • Evaporation
  • Advanced Packaging Device
    • TSV
      • Etching
      • Ashing
      • PE-CVD
      • Sputtering
    • CSP
      • PE-CVD
      • Sputtering
  • MEMS Device
    • Etching
    • Ashing
    • Sputtering
    • Evaporation
    • CVD
    • Development Prototype
  • Optical Film
    • Etching
    • Sputtering
    • Evaporation
    • CVD
  • Magnetic Device
    • Sputtering
    • Evaporation
    • Etching
  • Thin-film Lithium Ion Secondary Battery
    • Sputtering
    • Evaporation
    • Vapor Deposition Polymerization
  • LCD
    • Array Process
      • Sputtering
      • Evaporation
      • CVD
    • Color Filter Process
      • Sputtering
      • Evaporation
  • OLED
    • Sputtering
    • CVD
    • Evaporation
  • Touch Panel
    • Glass substrate
      • Sputtering
      • CVD
      • Evaporation
    • Flexible Substrate
      • Sputtering Roll Coater
      • Evaporation
  • R&D Equipment for Display
    • Sputtering
    • CVD
    • Evaporation
  • Photovoltaic
    • Thin film solar cell
      • Sputtering
      • CVD
      • Others
      • Evaporation
    • Crystalline silicon solar cell
      • Sputtering
      • CVD
    • Compound semiconductor solar cell/Others
      • Sputtering
    • R&D
      • Sputtering
      • CVD
      • Evaporation
  • Magnet
    • Rare Earth Magnet
      • Sintering
      • Aging
  • Automobile Parts
    • Window Coating
      • CVD
    • Mirror
      • Sputtering
    • Heat exchanger
      • Brazing
      • Leak Detection
    • Cam parts, Gear parts
      • Heat Treatment
      • Sintering
    • Wheel Coatings
      • Sputtering
    • Magnet
    • Capacitors
    • Power Device
  • Wiring Materials
    • Flexible Printed Circuits
      • Evaporation
  • Capacitors
    • Film capacitor
      • Evaporation
    • Ta Capacitor
      • Sintering
  • Packaging Materials
    • Food Packaging
      • Evaporation
      • Leak Detection
    • Barrier Packaging
      • Evaporation
      • Leak Detection
  • Decorative Coating
    • Metallic Yarn
      • Evaporation
    • In-Mold Decoration Film Insert Decoration
      • Evaporation
  • Pharmaceutical
    • Active pharmaceutical ingredient
      • Drying
      • Distillation
    • Drag Intermediate
      • Drying
      • Distillation
    • Solid preparation/Injection (sterile product)/Reagent
      • Drying
  • Food Processing
    • Health food/Food additive/Edible fat and oil
      • Distillation
    • Dried food
      • Drying
  • Health Care
    • Cosmetic materials/ Health supplement materials
      • Distillation
  • Electronics Materials
    • Mold materials/ Resist materiasl/ Lubricant
      • Distillation
    • Polymer material
      • Drying
      • Distillation
    • Ceramics/Metal powder
      • Drying
  • Functional Materials
    • Shape memory alloy
      • Induction Melting
  • Aviation
    • Airplane Parts
      • Heat Treatment
      • Brazing
  • Power Transmission
    • Vacuum Circuit Breaker
      • Sintering
      • Brazing
    • Film Capacitor
      • Evaporation
  • Home Appliance
    • Vacuum Thermos
      • Brazing
    • Heat Exchangers for Hot-Water Supply Machine
      • Brazing
      • Leak Detection
    • Heat Exchangers for Air-Conditioners
      • Brazing
      • Leak Detection
    • Compressors for Air-Conditioners
      • Brazing
      • Leak Detection

COMPONENTS

• Vacuum Pump
  • Dry Pump
  • Oil Rotary Pump
  • Mechanical Booster Pump
  • Ion Pump
  • Turbo Molecular Pump
  • Oil Diffusion Pump
  • Cryo Pump
• Vacuum Gauge
  • Capacitance Manometer
  • Pirani Vacuum Gauge
  • Extremely High Vacuum Gauge
  • Hot Cathode Type Ionization Vacuum Gauge
  • Transducer Type G-Tran Series
• Process Gas Monitor
• Leak Detector
• Thin Film Measurement/Deposition Controller
  • Spectroscopic Ellipsometer
  • Film Thickness Measurement
  • Deposition Controller
• Optical Process Monitor
• Vacuum Valve
  • Vacuum Angle Valve
  • Gate Valve
  • Other Types of Valve
• Parts for Ultra-High Vacuum
• Power Generator
• Transfer Robot
• Software
• Precise Microplate Paddle Mixer
• Catalog Download
• Drawing Data Download
• I/O Data Download
• Termination of Production and Maintenance

MATERIALS

• Sputtering Targets
  • For FPD
  • For Semiconductor
  • For Photovoltaic
  • ITO Target
  • IGZO Target
  • Evaporation Deposition Materials
• High Performance Materials
  • [Ta][Nb] Sheet
  • [Ta][Nb] Wire/Bar
  • [Ta][Nb] Tube/Pipe
  • [Ta][Nb][Zr] Reactor Vessels
  • [Ta][Nb] Heat Exchanger
  • [Ta][Nb][Zr] Columns
  • [Ta][Nb][Zr][Ti] Coating
  • [Ta][Nb][Zr][Ti] Pipings
• Nano-metal Ink
• Conflict Minerals Policy

CUSTOMER SUPPORT

• Field Service for Equipment
  • Field Service
  • Global CIP
  • Factory Outsourcing
  • Recycling / Cleaning / Reusing Resources
• Maintenace for Component
  • Pump Maintenance Service
  • JCSS Calibration Service (Vacuum Gauge)
  • Termination of Production and Maintenance
• Parts Supply
• Surface Treatment
• Analysis Service
• Used Equipment/Refurbish

Copyright (C) 2001-2015 ULVAC, Inc. All rights reserved.