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Vacuum Valve

ULVAC provides various vacuum valves based on extensive technical knowledge. Use ULVAC’s valves for all atmospheric pressure through ultra high vacuum applications. Satisfaction guaranteed!

Vacuum Angle Valve

Vacuum Angle ValveVLP-SA/VLP-SB/VLP-MB series

vlp-sa_vlp-sb

Stainless steel made valve from 5/8 ~ 14 inch. Double-acting cylinder with either O-ring shaft or bellows feedthrough. Type of flange is selectable from JIS-VF, ISO-KF, ISO-K and ISO-CF.

Vacuum Angle ValveVLB-SA/VLB-SB series

vlb-sa_vlb-sb

Stainless steel made valve from 5/8 ~ 2 inch. Single-acting cylinder with either O-ring shaft or bellows feedthrough. Type of flange is ISO-KF.

Vacuum Angle ValveVLH-SB/VLH-MB series

vlh-sb

Stainless steel made valve from 5/8 ~ 6 inch. Manual cylinder with bellows feedthrough. Type of flange is JIS-VF, ISO-KF, ISO-K and ISO-CF.

Vacuum Angle ValveVLP-U series

vlp-u

Soft steel made large size valve from 20 ~ 36 inch. Double-acting cylinder with O-ring shaft feedthrough. Type of flange is JIS-VF.

Gate Valve

Large Pendulum Valve
VFR Series

VFR

ULVAC's VFR series Large Pendulum Valve (gate valve) offers a compact design with unique technology. Applications include OLED, PV,Glass, FPD, and other manufacturing systems.

 

High Vacuum Gate Valves With Manual Operation and O-Ring Shaft Seals
VAH Series

vah

The VAH Series are manual high vacuum gate valves developed using ULVAC's wealth of accumulated vacuum technology and experience. They enable conductance to be easily adjusted.

High Vacuum Gate Valves With Pneumatic Operation and O-Ring Shaft Seals
VAP Series

vap

The VAP Series are pneumatically-operated high vacuum gate valves developed using ULVAC's wealth of accumulated vacuum technology and experience. The large conductance when the disk is released maximizes vacuum pump specifications such as evacuation performance.

Other Types of Valve