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UTM Series

Pivot Bearing Type Turbo Molecular Pumps
UTM Series

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utm

The UTM series is an all the blades type turbo molecular pump which carries a pivot bearing (lower side) and a magnetic bearing (upper side).
The mechanical contact at the time of a high velocity revolution is reduced by adoption of the pivot bearing.
Moreover, a low vibration and a high compression ratio are realized.

Features

  • The magnetic bearing was adopted as the upper part, the pivot bearing was adopted as the lower part, and the mechanical contact at the time of a high velocity revolution is eliminated.
    Thereby, bearing exchange and an oil change become unnecessary and realize extended life-span of  bearing.
  • The fine dynamic balance rotor and highly efficient bearing by design of original blades realize a high velocity revolution, and inlet performance (high compression ratio) of low molecular weight gas, such as H2 and He.
  • A pivot bearing and fluoride oil (oil whose saturated vapor pressure is chemically stable and is low) are adopted, and environment without the infinite oil near zero is realized.
    Achievement of clean, ultra high vacuum is possible.
  • Adoption of a fine dynamic balance rotor and a highly efficient bearing realizes low noise and low vibration.

Applications

  • The main vacuum systems, such as analysis equipment, research-and-development equipment, and an experimental device.As rough vacuum pumps for accelerators and beam lines
  • The main vacuum system of low quality quantity molecule gas, such as H2 and He.
  • The main vacuum systems which are vibration sensitive, such as analysis equipment and evaluation equipment.

Specifications

Model UTM -50 UTM -150 UTM -300 UTM -500
Inlet flange size CF114 CF152 CF203
VG65 VG100 VG150
Outlet flange size NW16 NW25 NW40
Pumping speed *1 *2 N2 50L/s 190L/s 300L/s 550L/s
H2 40L/s 160L/s 260L/s 500L/s
Ultimate pressure *1 *3 10-7Pa 10-8Pa
Maximum compression ratio *1 *3 N2 >108
H2 103 104 105
Bearing type Top Magnet bearings
Bottom Pivot bearings
Cooling method Water-cooled/air-cooled
*1 Value measured in accordance with JVIS005 standard, or calculated value based on it
*2 Evacuation speed values are values when protective mesh isn't used.
*3 Values given are orders of magnitude.

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