The UTM series is an all the blades type turbo molecular pump which carries a pivot bearing (lower side) and a magnetic bearing (upper side).
The mechanical contact at the time of a high velocity revolution is reduced by adoption of the pivot bearing.
Moreover, a low vibration and a high compression ratio are realized.
|Model||UTM -50||UTM -150||UTM -300||UTM -500|
|Inlet flange size||CF114||CF152||CF203|
|Outlet flange size||NW16||NW25||NW40|
|Pumping speed *1 *2||N2||50L/s||190L/s||300L/s||550L/s|
|Ultimate pressure *1 *3||10-7Pa||10-8Pa|
|Maximum compression ratio *1 *3||N2||>108|
|Bearing type||Top||Magnet bearings|
|*1||Value measured in accordance with JVIS005 standard, or calculated value based on it|
|*2||Evacuation speed values are values when protective mesh isn't used.|
|*3||Values given are orders of magnitude.|