The UTM-FH and UTM-FW is compound turbo molecular using 5 axis magnetic levitation and digital controlled and realized advantages such as high performance and reliability and energy savings. The UTM-FH series, which has improved compression ratio for hydrogen, is high back pressure and high compression type and for light to middle processes. The UTM-FW series is wide range and high flow type and for high load process and middle~hard processes.
|Wide range and
high throughput models
and high compression models
|Inlet flange size||N2 pumping speed
(L/s) *1 *2
Value measured in accordance with JVIS005 standard, or calculated value based on it
|*2||Protective mesh isn't used.|