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UTM-FH/FW Series

Digitally-Controlled Magnetic Levitation Turbo Molecular Pump
UTM-FH/FW Series

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utm-fw_fh

The UTM-FH and UTM-FW is compound turbo molecular using 5 axis magnetic levitation and digital controlled and realized advantages such as high performance and reliability and energy savings. The UTM-FH series, which has improved compression ratio for hydrogen, is high back pressure and high compression type and for light to middle processes. The UTM-FW series is wide range and high flow type and for high load process and middle~hard processes.

Features

  • Abundant variations from 350L/s (12.3CFM) to world's largest 6300L/s(222.4CFM) (digital magnetic controlled bearing type).
  • Maintainable stable pumping performance against change of back pressure (FH series).
  • Optional internal heating system to control rotor temperature and reduce adhesion of side reaction by-products (FW series).
  • Excellent anti-corrosion surface treatment (excluding 3303FH and 6300FH). Optional special surface treatments (e.g. Nickel plating + cation electro-deposition, special deposited film, aluminum anodization) are available as necessary.
  • Mountable in all direction.
  • Variable speed system marks it possible to change the pumping speed in the rang from 25% through 100%.
  • There is not limitation to combine any power supply and pump main unit to change cable length because of using coupling free system and tuning free system.
  • Self power generation by regenerative energy is used for backup power supply at power outage by using buttery free system. Troublesome buttery replacement is not necessary.
  • Built-in monitoring/self-diagnostic and communication functions enable to configure centralized monitoring system.
  • Safety design with fracture energy absorption construction can reduce damage on vacuum system when trouble happened with the pumps.
  • High durability and high reliability have been realized by experiments such as air rushing-in testing, various touching down testing, forced destruction testing for rotor and foreign material drop testing (Si wafer fall)

Applications

 

  • UTM-FH series
  • Main evacuation of light ~middle processes such as evaporator, sputtering system, dry etching, etc where there are not any side reaction by-products.
  • Main evacuation of analytical instrument, R&D system, laboratory equipment, etc.
  • Main evacuation for those equipment and system for light gas such as H2 and He.
  • Multiple turbo molecular pumps with centralized back pump configuration.

 

  • UTM-FW series
  • Main evacuation of middle to hard processes such as dry etching, CVD system, etc.
  • High flow gas evacuation for dry etching, CVD system, sputtering system, etc.
  • Main evacuation of analytical instrument, R&D system, laboratory equipment, etc.

Specifications

Wide range and
high throughput models
High back-pressure
and high compression models
Inlet flange size N2 pumping speed  
(L/s)  *1  *2
- UTM-6300FH VG500 6300
UTM-3301FW UTM-3303FH VG350 3300
UTM-2300FW - VG300 2730
VG250 2230
ICF305 2110
UTM-1400FW - VG250 1490
VG200 1360
ICF253 1300
UTM-1001FW UTM-1001FH VG200 1000
ICF253 1000
UTM-800FW UTM-800FH VG150 810
ICF203 740
UTM-480FW UTM-480FH VG150 480
ICF203 480
UTM-350FW UTM-350FH VG100 350
ICF152 330
*1

Value measured in accordance with JVIS005 standard, or calculated value based on it

*2 Protective mesh isn't used.

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