A complete line of turbo molecular pumps are available from ULVAC. ULVAC’s turbo molecular pump meets a broad range of vacuum applications. From simple vacuum generation for analytical instrumentation, to the demanding pumping requirements encountered in corrosive processes for the semiconductor industry.
The UTM series is an all the blades type turbo molecular pump which carries a pivot bearing (lower side) and a magnetic bearing (upper side).
The mechanical contact at the time of a high velocity revolution is reduced by adoption of the pivot bearing.
Moreover, a low vibration and a high compression ratio are realized.
The UTM-FH and UTM-FW is compound turbo molecular using 5 axis magnetic levitation and digital controlled and realized advantages such as high performance and reliability and energy savings. The UTM-FH series, which has improved compression ratio for hydrogen, is high back pressure and high compression type and for light to middle processes. The UTM-FW series is wide range and high flow type and for high load process and middle~hard processes.