COMPONENTS

Top > COMPONENTS > Vacuum Pump > Turbo Molecular Pump >

Turbo Molecular Pump

A complete line of turbo molecular pumps are available from ULVAC. ULVAC’s turbo molecular pump meets a broad range of vacuum applications. From simple vacuum generation for analytical instrumentation, to the demanding pumping requirements encountered in corrosive processes for the semiconductor industry.

Ceramic Ball Bearing Turbo Molecular Pump UTM70B

UTM70B_240

UTM70B is the compound turbo molecular pump with the ceramic ball bearings,

and has excellent compression ratio. Compact design by integrated controller

design. Excellent high back pressure performance allows to use smaller backing

pump.

Turbo Molecular Pumping System Desktop YTP

YTP_240

Desktop high vacuum pumping station featuring a low noise, low vibration design and ceramic ball bearing turbo molecular pump.Simple, easy to read touch screen control for user-friendly operation.

Ceramic Ball Bearing Turbo Molecular Pump
UTM300B

UTM300B

UTM300B is the compound turbo-molecular pump with the ceramic ball bearings, and has excellent compression ratio. Compact design by integrated controller design. Excellent high back pressure performance allows to use smaller backing pump.

Pivot Bearing Type Turbo Molecular Pumps
UTM Series

utm

The UTM series is an all the blades type turbo molecular pump which carries a pivot bearing (lower side) and a magnetic bearing (upper side).
The mechanical contact at the time of a high velocity revolution is reduced by adoption of the pivot bearing.
Moreover, a low vibration and a high compression ratio are realized.

Turbo Molecular Pumping System YTP series Ver.B

240ytpb

YTP Series version B is a high vacuum pumping system with a ceramic ball bearing turbo molecular pump.Vacuum pumping from atmospheric pressure to high vacuum is possible. ULVAC prepares two types, SA type which allows the automatic pumping by START / STOP switch and M type which is a manual operation. In addition, the back pump can be selected from rotary pump as a standard specification, or dry scroll pump as the other selection.

Digitally-Controlled Magnetic Levitation Turbo Molecular Pump
UTM-FH/FW Series

utm-fw_fh

The UTM-FH and UTM-FW is compound turbo molecular using 5 axis magnetic levitation and digital controlled and realized advantages such as high performance and reliability and energy savings. The UTM-FH series, which has improved compression ratio for hydrogen, is high back pressure and high compression type and for light to middle processes. The UTM-FW series is wide range and high flow type and for high load process and middle~hard processes.

▲Return to Top