Top > COMPONENTS > Vacuum Pump > Oil Rotary Pump >

Oil Rotary Pump

The superior pumping performance of ULVAC’s oil rotary vacuum pumps has earned them an excellent reputation among many users. These pumps are suitable for various applications of the vacuum deposition, the sputtering, and the food packing, etc.

Oil Rotary Vacuum Pump
VD Series Ver.C


VD series is a direct-drive oil rotary pump with high efficiency (IE3) multi-voltage motor fully developed by ULVAC. This dual stage rotary vane mechanical vacuum achieves lower ultimate pressure. Design optimization realized quiet operation and so this pump is suitable for a wide range of applications.

Oil Rotary Vacuum Pump
VS650A / VS750A [650 to 750m3(10833 to 12500 L/min)]


The VS650A and VS750 are single stage oil rotary vane pumps. Design to provide low vibration and noise, the VS series eliminates the need for costly facility work.  Both air cooled and water cooled models are available depending on customer installation requirements.

Oil Rotary Vacuum Pump
VD Series [14.4 to 108m3(240 to 1800 L/min)]


Recently the move to improve work environments is creating a large demand for quieter vacuum pumps. Developed to meet this demand, the VD series are oil rotary vacuum pumps with low-noise direct-coupled motors. Designed for easy maintenance, the VD series makes daily maintenance and inspection extremely simple. Series models can be used in a wide range of applications on sites ranging from research labs (where silence is indispensable) to production lines.

Oil Rotary Vacuum Pump
VS Series [150 to 288 m3/h (2500 to 4800 L/min)]


VS series is a single-stage oil rotary vacuum pump coupled with a direct-drive motor. ULVAC's simplified design gives this lightweight pump the features of compact size along with low vibration operation. The substantial reduction in vibration of the VS series pump can help reduce the costs associated with having to perform special foundation work in facilities where vibration can be problematic. Additionally, enhancements in both the oil circulation and cooling systems result in increased stability of pumping performance at high inlet pressures. These VS series pumps are typically used in a wide range of applications, especially those having a large number of repetitive pumping steps that cycle from atmospheric pressure, such as in the automated leak testing of parts, as well as numerous other industrial applications.

Oil Rotary Vacuum Pump
PVD Series [9 to 22m3/h(155 to 372L/min)]

Oil Rotary Vacuum Pump PVD Series

The PVD series are belt-driven compact rotary vacuum pumps with outstanding evacuation characteristics. They are used by a large number of ULVAC customers.

Oil Rotary Vacuum Pump
PKS Series [96 to 420m3/h(1600 to 7000L/min)]

Oil Rotary Vacuum Pump PKS Series

The PKS series models are extremely durable, large oil rotary vacuum pumps with very stable pumping characteristics. They are used in many applications, in areas ranging from the metal and automotive industries, to the chemical, pharmaceutical and food industries.

Oil Mist Trap
TM/TMX Series

Oil Mist Trap TM_TMX Series

When an oil rotary pump is started at atmospheric pressure, and operated during low vacuum operation, the pump oil is exhausted along with the exhaust gas that is being pumped. This oil-laden exhaust mist, which consists of tiny oil droplets, appears as “smoke” exiting from the exhaust port of the pump. The TM and TMX series oil mist traps help to ensure a clean working environment and protect indoor equipment from contamination that would otherwise be caused by this oil mist.

▲Return to Top