By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops.
|Actual pumping speed *1||50Hz||3800m3/h
Maximum suction pressure
|50Hz||8.0 x 102Pa|
|Ultimate pressure *2||6.7 x 10-1Pa|
|Allowable drive pressure||1.0 x 103Pa|
|Motor (number of poles) *3||15kW (4P)||18.5kW (4P)|
|Oil *4||ULVOIL R-7|
|Cooling water||Cooling method||Water cooling|
|Primary side pressure||0.3MPa||0.1 to 0.3MPa|
|Inlet/outlet differential pressure||0.05MPa|
|Cooling water volume||10L/min|
|Cooling water temperature||5 to 30ºC|
|Suction diameter JIS B 2290||Corresponds to VG250||Corresponds to VG300|
|Exhaust port diameter JIS B 2290||Equivalent to VF150||Equivalent to VF200|
L x W x H *5
|764 x 1230 x 707mm||764 x 1470 x 707mm|
|Standard backing pump||PKS-070||PKS-070 x 2|
SI units are used in this specification. The following conversion can be used for non-SI units.
|*1||Measured value at 13 Pa|
|*2||Measured by pirani vacuum gauge (with standard backing pump and oil).
The value would be 6.7 x 10-2 Pa when measured with a McLeod vacuum gauge.
|*3||200 VAC 50/60 Hz; 200 VAC 60 Hz; 3-phase|
|*4||Pump oil types other than the standard type are available. Contact ULVAC.|
|*5||W = width, D = depth, H = height|