Mechanical booster pumps are used with other roughing vaccum pumps, such as oil rotary pumps, dry vacuum pumps, and water sealed pumps. As the name implies, they are used to “boost” the pumping speed of the roughing pumps within their normal vaccum range.
By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops. The PRC series is designed for semiconductor and liquid crystal display processes which especially require cleanliness. Atmospheric pressure start type can be selected as option.