Sputter ion pumps are one type of pump used to create ultra-high vacuum, and are used in many analyzers and accelerators.
ULVAC's acter pumps are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuum, and to optimize magnetic fields.
Evacuation speed to 1 x 10-7
|Final pressure||10-9Pa order|
-3Pa (recommended value)
|Volume||6.7 X 10-4m3 approx.|
|Number of pump elements||CX cell (x 1), AX cell (x 1)|
|Connection flange model||UFC070|
|Standard bake-out temperature||250°C|
|Weight||9.5 kg approx.|
|External dimensions W x D x H||103 x 183 x 187 mm|