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PST-030CU/AU

Sputter Ion Pump
PST-030CU/AU

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PST30

Sputter ion pumps are one type of pump used to create ultra-high vacuum, and are used in many analyzers and accelerators.
ULVAC's acter pumps are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuum, and to optimize magnetic fields.

Features

  • Ultimate pressure in the 10-9 Pa order (achieved with test dome complying with ISO standards)
  • Double the pumping performance achieved by the inert gas enhanced pumping model (type AU)
    (compared with the ULVAC's conventional pumps)
  • High pumping speed attained the ultra-high vacuum
  • Pumping down to ultra-high vacuum in a short period of time
  • Top-notch pumping characteristics in ultra and extremely-high vacuum
    (discharging maintained down to the ultra-high vacuum)

Applications

  • Accelerators
  • Electron microscopes
  • Analyzers

Specifications

Evacuation speed to 1 x 10-7
(reproduced evacuation speed)

N2: 0.03m3/s(CU · AU)
0.02m3/s(at 1x10-7Pa)
Final pressure 10-9Pa order
Operation pressure

-3Pa (recommended value)
(Maximum operation pressure : 1 x 10-2Pa)
*(Using GST-07L controller)

Volume 6.7 X 10-4m3 approx.
Number of pump elements CX cell (x 1), AX cell (x 1)
Connection flange model UFC070
Applied voltage DC+7.5kV
Standard bake-out temperature 250°C
Weight 9.5 kg approx.
External dimensions   W x D x H 103 x 183 x 187 mm

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