Sputter ion pumps are one type of pump used to create ultra-high vacuum, and are used in many analyzers and accelerators.
ULVAC's acter pumps are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuum, and to optimize magnetic fields.
|Evacuation speed to 1 x 10-7 Pa
(reproduced evacuation speed)
|Final pressure||10-9Pa order|
|Operation pressure||-3Pa (recommended value)
(Maximum operation pressure : 1 x 10-2Pa)
*(Using GST-07L controller)
|Volume||3.3 x 10-3m3 approx.|
|Number of pump elements||CX2 cell (x 1), AX2 cell (x 1)|
|Connection flange model||UFC152|
|Standard bake-out temperature||250°C|
|Weight||37 kg approx. (with heater)|
|External dimensions W x D x H||155 x 340 x 340 mm|
|Power required by heater unit||Single-phase 200 V, 320 W approx.|