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Acter Pumps

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Sputter ion pumps are one type of pump used to create ultra-high vacuum, and are used in many analyzers and accelerators.
ULVAC's acter pumps are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuum, and to optimize magnetic fields.


  • Ultimate pressure in the 10-9 Pa order (achieved with test dome complying with ISO standards)
  • Double the pumping performance achieved by the inert gas enhanced pumping model (type AX2)
    (compared with the ULVAC's conventional pumps)
  • High pumping speed attained in the ultra-high vacuum
  • Pumping down to ultra-high vacuum in a short period of time
  • Top-notch pumping characteristics in ultra and extremely-high vacuum (discharging maintained down to the ultra-high vacuum)


  • Accelerators
  • Electron microscopes
  • Analyzers


Evacuation speed to 1 x 10-7 Pa
(reproduced evacuation speed)
N2: 0.10m3/s(CX · AX)
0.08m3/s(at 1 x 10-7Pa)
Final pressure 10-9Pa order
Operation pressure -3Pa (recommended value)
(Maximum operation pressure : 1 x 10-2Pa)
*(Using GST-07L controller)
Volume 3.3 x 10-3m3 approx.
Number of pump elements CX2 cell (x 1), AX2 cell (x 1)
Connection flange model UFC152
Applied voltage DC+7.5kV
Standard bake-out temperature 250°C
Weight 37 kg approx. (with heater)
External dimensions  W x D x H 155 x 340 x 340 mm
Power required by heater unit Single-phase 200 V, 320 W approx.

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