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Acter Pumps

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Sputter ion pumps are one type of pump used to create ultra-high vacuum, and are used in many analyzers and accelerators. ULVAC's acter pumps were developed to enable single sputter ion pumps to create ultra-high and extremely high vacuums on the order of 10-10 Pa. They are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuum, and to optimize magnetic fields.


  • Ultimate pressure in the 10-10 Pa order (achieved with test dome complying with ISO standard)
  • Double the pumping performance achieved by the inert gas enhanced pumping model (type AX2) (compared with the ULVAC's conventional pumps)
  • High pumping speed attained in the ultra-high vacuum
  • Pumping down to ultra-high vacuum in a short period of time
  • Top-notch pumping characteristics in ultra and extremely-high vacuum (discharging maintained down to the ultra-high vacuum)


  • Accelerators
  • Electron microscopes
  • Analyzers


Evacuation speed to 1 x 10-7 Pa
(reproduced evacuation speed)
N2: 0.20m3/s(CX2 · AX2)
Ar : 0.02m3/s(CX2)   0.105m3/s(AX2)
Final pressure 10-10Pa order
Operation pressure

-3Pa (recommended value)
(Maximum operation pressure : 1.3 x 10-2Pa)
*(Using GST-07L controller)

Volume 0.011m3 approx.
Number of pump elements CX2 cells (x 2), AX2 cells (x 2)
Connection flange model UFC203
Applied voltage DC+7.5kV
Standard bake-out temperature 250°C
Weight 65kg approx.(with heater, cover)
External dimensions   W x D x H 296 x 361 x 376 mm
Power required by heater unit Single-phase 200 V, 600 W approx.

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