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GR Series

Dry Vacuum Pump
GR Series

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GR90

Based on many years of experience with the LR/HR Series ULVAC has introduced the GR Series Dry Vacuum pump with a simple and clean design for general industrial applications.

Features

  • Particularly useful for high load applications such as repeated pump down between atmospheric pressure and vacuum and continuous running in the high pressure range.
  • Useful for load/unload lock chambers which require high throughput.
  • A universal induction motor is used. An explosion proof motor is avaialble as an option.
  • For motor power. Specify voltage  required when ordering. Either 200 VAC Class or Multiple voltage motors are available.

Applications

  • Clean gas vacuum pumping such as air, inert gas.
  • Load/unload lock chambers of various types of deposition equipment.
  • General industrial applications such as vacuum dryer, vacuum gas exchange in vacuum heat insulation and gas charging, vacuum degassing, etc.

Specifications

Model
GR60A

GR90A

GR180A
Hz 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
Maximum pumping speed m3/h

62

80 112 126 183 237
L/min 1030 1333 1860 2100 3100 3950
cfm 36.4 47.1 65.7 74.2 109.5

139.5

Ultimate pressure

5.0Pa *1
3.7 x 10-2Torr *1
5.0 x 10-2mbar *1
Maximum inlet pressure Atmospheric pressure
Maximum exhaust pressure 1.0Pa to Atmospheric pressure
7.5 x 10-3Pa to Atmospheric pressure
1.0 x 10-2mbar to Atmospheric pressure
Inlet port VG50 or ISO63F Equivalent to VG80 or ISO80F
Outlet port NW40
Surface treatment Standard option
Weight

128kg

188kg

268kg

Cooling water Supply pressure 0.1 to 0.3MPa
14.5 to 43.5psi
In/Out difference pressure >0.1MPa
>14.5psi
Temperature 10 to 30ºC *2
50 to 86℃
Flow rate >5.0L/m
N2
Primary side supply pressure
0.1 to 0.5MPa
14.5 to 72.5psi

Secondary side

regulated pressure *3

0.05 to 0.1 (at running)
7.3 to 14.5psi
Shaft
5SLM *4

*1 Ultimate pressure is the value when the nitrogen gas (shaft seal gas) is at 5.0SLM.

*2 Non condensing.

*3 Value indicated on pressure gauge is adjusted by a gas regulator.

*4 Flow rate of nitrogen gas (shaft seal gas) is fixed at 5.0SLM.

■  Specify a motor voltage from following table when ordering.

     Either a 200 Volt class motor or a multiple volt motor

Model
GR60A
Selectable motor 200V class motor Multiple voltage motor
Frequency
Hz

50

60
50 60
50
60
Voltage
V

200

200
220
220
240
208
220
240
380
400
415
380
440
460
Rated current A 9.2 8.8 8.1 8.1 8.1 8.5 8.1 7.4 4.8 4.8 4.7 4.6 4.3 4.1
Wiring Delta wiring Delta wiring Star wiring

 

 Model GR90A
Selectable motor 200V class motor Multiple voltage motor
Frequency
Hz

50

60
50 60
50
60
Voltage
V

200

200
220
220
240
208
220
240
380
400
415
380
440
460
Rated current A 14.2 14.1 12.8 12.8 12.7 13.4 12.8 11.8 7.5 7.4 7.3 7.3 7 6.3
Wiring Delta wiring Delta wiring Star wiring

 

Model
GR180A
Selectable motor Common multiple volt motor available for this pump
Frequency
Hz

50

60
50
60
Voltage
V

200

200
240
200
208
220
240
380
400
415
380
440
460
Rated current A 26.1 25.1 25.7 26.3 24.9 23.9 22.5 14.5 14.7 14.9 13.9 13.3 12.5
Wiring Delta wiring Star wiring

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