ULVAC offers the superior dry pump series for all semiconductor and FPD manufacturing processes. The LR/HR/UR series have high durability in the hard processes of CVD, etching etc.
ULVAC's unique approach to utilize the generated heat from within the dry pump body allows the LR/HR/UR series to perform even in the most stringent processes. ULVAC has focused the design efforts into maintaining an extremely uniform high temperature throughout all pump stages making this series pump optimal for CVD and etch applications.
ULVAC's ECO-SHOCK can be added to the LR pump for additional energy savings of up to 70% for any light processes including pumping air or nitrogen.
ECO-SHOCK is a revolutionary dry pump accessory that can reduce power consumption by attaching to the dry pump exhaust line.
ES4A is optimal model for the power saving and reduction of dry pump for the frequently air exhaust of Load/Unload chamber or for back pump of turbo-molecular pump which takes long time to reach to the ultimate pressure.
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