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Dry Pump

ULVAC offers the superior dry pump series for all semiconductor and FPD manufacturing processes. The LR/HR/UR series have high durability in the hard processes of CVD, etching etc.

Dry Vacuum Pump
CR Series Ver.B

CR60A

Dry Vacuum Pump CR series Ver.B is an air-cooled roots type dry vacuum pump. IT complies with international standard(CE,cTUVus).Stable operation and extended lifetime are possible  because there is no oil inside of the pump head and no contact between rotor and cylinder.

Dry Vacuum Pump
GR Series

GR90

Based on many years of experience with the LR/HR Series ULVAC has introduced the GR Series Dry Vacuum pump with a simple and clean design for general industrial applications.

Dry Pump
LR/HR/UR Series

lr_hr

ULVAC's unique approach to utilize the generated heat from within the dry pump body allows the LR/HR/UR series  to perform even in the most stringent processes. ULVAC has focused the design efforts into maintaining an extremely uniform high temperature throughout all pump stages making this series pump optimal for CVD and etch applications.
ULVAC's ECO-SHOCK can be added to the LR pump for additional energy savings of up to 70% for any light processes including pumping air or nitrogen.

Power-Saving Attachment
ECO-SHOCK ES10

eco-shock

ECO-SHOCK is a revolutionary dry pump accessory that can dramatically reduce power consumption by attaching to the dry pump exhaust line.

Power Saving Accessory for Dry Pumps
ECO-SHOCK ES4A

ecoshock_es4a

ECO-SHOCK is a revolutionary dry pump accessory that can reduce power consumption by attaching to the dry pump exhaust line.
ES4A is optimal model for the power saving and reduction of dry pump for the frequently air exhaust of Load/Unload chamber or for back pump of turbo-molecular pump which takes long time to reach to the ultimate pressure.

 Patent is registered (China,Japan,Korea,Singapore,Taiwan)

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