COMPONENTS

Vaccum Pump

The superior pumping performance of ULVAC's vacuum pumps has earned them an excellent reputation among many users.
Various ULVAC vacuum pumps are shown based on operating pressure range. (Operating pressure range varies depending on the model.)
Please choose a unit of pressure [Pa] [Torr] [mbar].

Dry Pumps

Oil Rotary Pumps

Mechanical Booster Pump

Turbo Molecular Pumps

Oil Diffusion Pumps

Titanium Getter Pumps

Ion Pumps

Cryo Pumps

Dry Pumps

Oil Rotary Pumps

Mechanical Booster Pump

Turbo Molecular Pumps

Oil Diffusion Pumps

Titanium Getter Pumps

Ion Pumps

Cryo Pumps

Dry Pumps

Oil Rotary Pumps

Mechanical Booster Pump

Turbo Molecular Pumps

Oil Diffusion Pumps

Titanium Getter Pumps

Ion Pumps

Cryo Pumps