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SC1

G-Tran Series Cold Cathode Gauge
SC1

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G-Tran Series Cold Cathode Gauge Measuring Units SC1

G-TRAN series SC1 is a magnetron type cold cathode vacuum gauge.
Since no filament is used, extended life between gauge replacement is assured. Maintenance is expected.
Ease of maintenance reduces the cost of ownership.

Features

  • Transducer specification
    When the pressure display is not required, the following advantages can be achieved:
    · Vacuum gauge cost is reduced because the display has been eliminated
    · Smaller size frees-up control panel space
    · Wiring is reduced
  • Maintenance is greatly simplyfied
  • Filament is eliminated: No damage from exposure to atmospheric pressure
  • Control output sign: 2 setpoint output
  • Output signal: Pressure reading is a 0 to 10V Log output (non-linear output)
  • Power supply voltage: Operated by DC24V

Applications

  • Process control in the pressure range of precision vacuum equipment used for semiconductor, optics and electronic parts manufacturing
  • Process control in low vacuum range for industrial equipment such as furnaces
  • Process control in the pressure range for vacuum systems with multiple process chambers, such as in-line sputtering and single wafer processing equipment

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