ELEC-RZ is the wafer transfer robot in the high vaccum environment, implemented with compact and low cost based on outstanding function and performance of COVOT series.
|Pressure range||to 10-6Pa|
|Number of wafer||1 or 2|
|Minimum rotation diameter *||944mm|
|Weight capacity (hand is included)||1kg|
|Speed||R||Max 2.5sec / full stroke|
|θ||Max 3.0sec / 180º|
|Z||Max 1.5sec / 20mm|
*Changes by the arm and hand.