COMPONENTS

Top > COMPONENTS > Transfer Robot > Vacuum Transfer Robot
COVOT-LC

Vacuum Transfer Robot
COVOT-LC

For more Information

COVOT‐LC

COVOT-LC is a simple and reasonable vacuum transfer robot without the Z-axis.

Features

  • Simple 2 axis robot without the Z axis.
  • Built-in controller enables compact equipment layout.
  • Corresponds to the high vacuum to 10-5Pa.

Applications

  • Automatic wafer transfer for various semiconductor equipments
  • Wafer transfer for various vacuum eqipment for R&D

Specifications

Pressure range to 10-5Pa
Wafer size 200mm/300mm
Number of wafer 1 or 2
Maximum distance* 880mm
Rotation -15º to 375º
Z-axis stroke -
Minimum rotation diameter * 802mm
Weight capacity (hand is included) 1kg
Speed R Max 2.5sec / full stroke
θ Max 2.5sec / 180º
Z -
Position Accuracy R ±0.2mm
θ ±0.2mm
Z -
Teaching pendant Option
Controller Built-in type

*Changes by the arm and hand.

Data download

To download drawing data and I / O data, advance user registration (free) is required.
Those who do not have user registration please register from the user registration page.

For more Information