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Clean and highly reliable vacuum transfer robot and transfer platform introduced by ULVAC technology as a vacuum equipment manufacture. Line up of a wide range of products that correspond to the various types of vacuum equipment.
ELEC-RZ is the wafer transfer robot in the high vaccum environment, implemented with compact and low cost based on outstanding function and performance of COVOT series.
COVOT-LC is a simple and reasonable vacuum transfer robot without the Z-axis.
COVOT-6 comprises 4 independent arms and is the vacuum transfer robot which realized high throughput.
NCH series is vacuum transfer platform that combines robot, core chamber and load lock.
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