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Spectroscopic Ellipsometer

UNECS series is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .

High-speed Spectroscopic Ellipsometer
UNECS-Portable (Portable)

UNECS-Portable

Compact Light-weighted Portable Type

UNECS series is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .

UNECS-Portable measurement unit weight is only 2.2kg.  It is easy to be carried for vacuum equipments site acceptance test and can measure large size samples by detaching its sample stage and putting it directly on samples.

High-speed Spectroscopic Ellipsometer
UNECS-1500M (Manual Stage)

UNECS-1500M

Manual Stage Type for φ150mm Samples

UNECS series is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .

UNECS-1500M is easy to locate measurement points by the easy-to-use manual R-θ stage.

High-speed Spectroscopic Ellipsometer
UNECS-1500A/2000A/3000A (Auto Mapping Stage)

UNECS-2000A

Automatic Stage Type with Mapping Function

UNECS series is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .

 3 models are available for φ150, 200 and 300mm samples. Auto mapping R-θ stage and auto focus function make it possible to measure film thickness of entire sample surface and dispay film thickness distribution by color map.

High-speed Spectroscopic Ellipsometer
UNECS-1M (Integration)

UNECS-1M

Built-in Type for System Integration

UNECS series is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .

UNECS-1M, the light weight and compact design sensor head, is capable to be integrated into various equipments. It is suitable for both of vacuum and atmospheric pressure environments.

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