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Thin Film Measurement/Deposition Controller

ULVAC offers a non-contact metal film thickness measurement system, compact high-speed spectroscopic ellipsometer, multi-probe evaluation system, local efficiency/haze measurement system, surface profile and resistivity measurement systems.

Spectroscopic Ellipsometer

High-speed Spectroscopic Ellipsometer
UNECS-Portable (Portable)

UNECS-Portable

Compact Light-weighted Portable Type

UNECS series is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .

UNECS-Portable measurement unit weight is only 2.2kg.  It is easy to be carried for vacuum equipments site acceptance test and can measure large size samples by detaching its sample stage and putting it directly on samples.

High-speed Spectroscopic Ellipsometer
UNECS-1500M (Manual Stage)

UNECS-1500M

Manual Stage Type for φ150mm Samples

UNECS series is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .

UNECS-1500M is easy to locate measurement points by the easy-to-use manual R-θ stage.

High-speed Spectroscopic Ellipsometer
UNECS-1500A/2000A/3000A (Auto Mapping Stage)

UNECS-2000A

Automatic Stage Type with Mapping Function

UNECS series is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .

 3 models are available for φ150, 200 and 300mm samples. Auto mapping R-θ stage and auto focus function make it possible to measure film thickness of entire sample surface and dispay film thickness distribution by color map.

High-speed Spectroscopic Ellipsometer
UNECS-1M (Integration)

UNECS-1M

Built-in Type for System Integration

UNECS series is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .

UNECS-1M, the light weight and compact design sensor head, is capable to be integrated into various equipments. It is suitable for both of vacuum and atmospheric pressure environments.

Film Thickness Measurement

Non-Contact Metal Film Thickness Measurement System
MESEC

MESEC

MESEC BIT-2000 / 3000 (built-in types) in semiconductor interconnect processes, the film thickness distribution is important for quality control of metal thin films deposited on wafers. This film thickness distribution affects device characteristics and yield. MESEC can measure film thickness directly on the product wafer, providing more reliable evaluation results and reducing monitor wafers.

Deposition Controller

Quartz Crystal Oscillation Type Deposition Controller
CRTM-6000G

Quartz Crystal Deposition Controller CRTM-6000G

The CRTM-6000G is a deposition controller with excellent cost / performance features.
Unit offer a wide depostion control range for single as well as multilayer films.

Quartz Crystal Deposition Controller
CRTM-9200

CRTM9100G

CRTM-9200 is a quartz crystal deposition controller that provides low-rate deposition control and high-precision film thickness control with an outstanding film thickness/rate resolution (0.0022Å ). An option enables deposition control for up to 4 materials simultaneously.

Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
CRTS-M6

Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller CRTS-M6

The rotary type multi-sensor “CRTS-M6” has been developed for the crystal oscillation type deposition controller “CRTM Series” .The 5MHz or 6MHz crystal is 6 pieces-mountable in the rotary type crystal holder.It can be used in such as a high rate vapor deposition and continuous multi-layer vapor deposition with safe.

Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller
CRTS-12NS

Multi-sensor for Quartz Crystal Oscillation Type Deposition Controller CRTS-12NS

The rotary type multi-sensor "CRTS-12NS" has been developed for the crystal oscillation type deposition controller "CRTM Series".The 5MHz crystal is 12 pieces-mountable in the rotary type crystal holder. It can be used in such as a high rate vapor deposition and continuous multi-layer vapor deposition with safe.