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Basic Process Gas Monitor Qulee BGM2 Series

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"Qulee" (pronounced as "KLEE"), is ULVAC's latest model for residual gas analysis. Feedback from
facility engineers in various production lines are incorporated in the new product design offering
utmost simplicity.(Ethernet compatible)
Most appropriate for system control of vacuum evaporator and va rious types of vacuum furnaces.


・Excellent in Cost Performance
 Suitable for RGA application
・Communication interface
 Ethernet compatible
・Integrated Display
 No need for PC
・Simple Operation
 "One Click" function
・Bake Out
 Max 120℃ (248℉) high temperature bake (250℃ (482℉)
 when sensors are removed)
・Degas Function
 Electron bombard degas
・Protection and Maintenance Features
 Ion source and secondary electron multiplier protection
 maintenance help function
・Various Leak Tests are Available
 Helium leak test, air leak test, leak up
・Total Pressure Measurement
 Capable of total pressure measurement
・Qulee QCS is Included
 This software is included and compatible with
 (Windows 7/8/10)
・Applicable Standard
 Conforms with CE


・Residual gas analysis for organic electro luminescence
・Residual gas monitoring for PV, FPD, and semiconductor
 manufacturing system
・Residual gas analysis in PVD system and vacuum
・Residual gas analysis for high vacuum pumping
 equipment, etc.
・Residual gas analysis for freeze drying system
・Various types of gas analysis for research and


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