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Qulee with YTP

Quadrupole Mass Spectrometer with Differential Pumping Kit
Qulee with YTP

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Qulee-with-YTP_240_240

A variation of Qulee, adding new features in response to custom er needs.
By adding a differential pumping unit, the Qulee provides measurement and analysis capabilities for
process management and residual gas analysis.

Features

・Excellent Cost Performance
 Provides gas analysis with an optional differentialpumping unit
・Compact Design
 Utilizes standard vacuum unit model desktop YTP
・Integrated Display Unit Design
 Provides visual data without need for a PC
・Easy to Operate
 One-click function for easy operation, no complex procedures
・Atmospheric Pressure Analysis
 Selectable maximum measurable pressures 3000Pa,500Pa,100Pa, 10Pa and 1Pa
 (22.5Torr, 3.75Torr, 0.75Torr, 7.5×10-2Torr and 7.5×10-3Torr/30mbar, 5mbar, 1mbar, 0.1mbar and 1.0×10-2mbar)
・Select a Model Depending on your Application
 Select from the mass numbers 1 to 100 (BGM2-101/102), 1 to 200(BGM2-201/202), 1 to 300(HGM2-302)
・Low noise
 43dB(A) or less at Ultimate pressure
・Pressure indication
 Designed for easy integration of 2 vacuum gauges
・Complete Leak Test Function
 Helium leak test, air leak test, leak up test
・Qulee QCS Ver.4 (Ethernet compatible)
 Software included (Windows 7/8/10)

Applications

・Various types of gas analysis for research and
 development
・Gas monitoring of PVD system during processing
 Residual gas analysis in PVD system
・Residual gas analysis for high vacuum pumping
 equipment, etc.

Specifications

Data download

To download drawing data and I / O data, advance user registration (free) is required.
Those who do not have user registration please register from the user registration page.

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