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Qulee RGM-202 / RGM-302

Reactive Gas Process Monitoring System
Qulee RGM-202 / RGM-302

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This process monitoring system has been developed for various kinds of applications such as etch, CVD and other reactive gas processes. Using ULVAC’s original ion source and pumping system enables you to achieve stable measurements results.

Features

  • Long term stable measurements results
  • Closed Ion Source Utilizing a Magnetic Field:
    Soft ionization provides less gas dissociation and higher sensitivity. Decomposition and adsorption due to thermal reactions are minimized in the ionization chamber.
  • Short distance between the process chamber and ion source allows quick-response of analysis.
  • Wide pressure range from 10-6 to 13kPa is available. (Choice of orifices)
  • No need for PC
  • "One Click" function
  • Max 120ºC High temperature bakeing.
  • Electron bombard degas
  • Protection and maintenance of ion source and secondary electron multiplier
  • Traceability of analysis tube (patent pending)
  • Various Leak Tests are Available (Helium leak test, air leak test, leak up)
  • Capable of total pressure measurement (External ionization gauge GI-M2)
  • This software is included and compatible with (Windows XP/7)

Applications

  • For etching and CVD process
  • Monitoring reactive gases during process
  • End-point monitoring for etching and cleaning processes
  • Residual gas analyzing
  • Leak testing

Data download

To download drawing data and I / O data, advance user registration (free) is required.
Those who do not have user registration please register from the user registration page.

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