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Basic Process Gas Monitor
Qulee BGM

Residual Gas Analysis/Process Gas Monitor
Basic Process Gas Monitor
Qulee BGM

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"Qulee" (pronounced as "KLEE"), is ULVAC's latest model for residual gas analysis. Feedback from facility engineers in various production lines are incorporated in the new product design offering utmost simplicity.
Most appropriate for system control of vacuum evaporator and various types of vacuum furnaces.


  • Excellent in Cost Performance: Suitable for RGA application
  • Integrated Display: No need for PC
  • Simple Operation: "One Click" function
  • Max 120˚C (248˚F) high temperature bake (250˚C (482˚F) when sensors are removed)
  • Electron bombard degas
  • Ion source and secondary electron multiplier protection maintenance help function
  • Traceability of analysis tube (patent pending)
  • Various Leak Tests are Available (Helium leak test, air leak test, leak up)
  • Capable of total pressure measurement (ionization gauge)
  • Qulee QCS is Included:
    This software is included and compatible with (Windows XP/7)
  • QIP (Quick Install Package system) is Included:
    Auto measuring package (refer to the options catalog for details)
  • Conforms with CE


  • Residual gas monitoring for PV, FPD, and semiconductor manufacturing system
  • Residual gas analysis in PVD system and vacuum deposition
  • Residual gas analysis for high vacuum pumping equipment, etc.
  • Residual gas analysis for freeze drying system
  • Various types of gas analysis for research and development

Data download

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