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Process Gas Monitor

“Qulee” is ULVAC’s latest model for residual gas analysis and monitoring. The ULVAC Qulee achieves highly accurate measurements with high resolution even at a high pressure (1Pa) order the simple (easy) to use Qulee today.

Quadurupole Mass Spectrometer with Differential Pumping Kit [Qulee with YTP-H]

Qulee-with-YTP_240_240

A variation of Qulee, adding new features in response to custom er needs.
By adding a differential pumping unit, the Qulee provides measurement and analysis capabilities for
process management and residual gas analysis.

Basic Process Gas Monitor Qulee BGM2 Series

Qulee_BGM

"Qulee" (pronounced as "KLEE"), is ULVAC's latest model for residual gas analysis. Feedback from
facility engineers in various production lines are incorporated in the new product design offering
utmost simplicity.(Ethernet compatible)
Most appropriate for system control of vacuum evaporator and va rious types of vacuum furnaces.

Software for Gas Analysis Qulee QCS

QuleeQCS2

"Qulee QCS" is a software package for gas analyzers and process monitors manufactured by ULVAC."Qulee QCS" is suitable for all Quadrupole gas spectrometers made by ULVAC. Older software can be upgraded to this QCS version.Data acquisition and saving data is carried out by simple key s trokes.

High Performance Process Gas Monitor Qulee HGM2 Series

Qulee_HGM

ULVAC’s new “Qulee HGM2” residual gas analyzer series with revolutionary simplicity of use.
Offers highest sensitivity of all models at 2.5 × 10-6 A/Pa (3.3 × 10-4A/Torr,2.5 × 10-4A/mbar), Qulee HGM2
can meet the needs of various R&D and other vacuum system proce ss monitoring.(Ethernet compatible)

Reactive Gas Process Monitoring System
Qulee RGM2-202 / RGM2-302

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This process monitoring system has been developed for various kinds of applications such as etch, CVD and other reactive gas processes. Using ULVAC’s original ion source and pumping system enables you to achieve stable measurements results.

Residual Gas Analysis/Process Gas Monitor
Compact Process Gas Monitor
Qulee CGM2

Qulee_CGM2-240×240

“Qulee” (pronounced as “KLEE”), is ULVAC’s latest model for residual gas analysis and gas monitoring during process. Feedback from facility engineers in various production lines are incorporated in the new product design offering utmost simplicity.
The Qulee offers high accuracy and resolution even at high pressure (1Pa or less).

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