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DPG-P Series [DPG-5P/DPG-10P]

Pulsed DC Power generators
DPG-P Series [DPG-5P/DPG-10P]

ss-DPG_10P

The DPG-5P/10P are 5kW/10kW pulsed dc power generators for reactive sputtering. This power generator change the minus output voltage in to plus voltage, and discharge the storage electron voltage of target surface. By this, yield and throughput improvement is realized.

Features

  • High throughput
    Makes high power input possible by reducing abnormal discharge
  • Reduces substrate damage
    Capable of reducing substrate damage caused by arcs
  • Variable inversion pulse frequency
    Possible range: 10kHz to 250kHz
  • Capable of large capacities through master/slave connections
    Up to six units can operate in parallel(The same model is available)
  • Corresponding to DC output
    It cancels a pulse function and can output DC

Applications

  • Reactive sputtering equipment for FPD
  • Reactive sputtering equipment for industrial coating
  • Reactive sputtering equipment for color TFT

Specifications

Model DPG-5P DPG-10P
Rated input Voltage 208VAC
Input voltage fluctuation range 187~229VAC
Phase, fequency Three phase, 50/60Hz
Input capacity 8kVA 13.5kVA
Maximum rated power 5kW 10kW
Rated current 12.5A 25A
Rated voltage 650V/800V※1
Oscillating fequency 10kHz ~ 250kHz
Reverse Time 0.4 to 5μs, variable※※2
Control method Constant power control (P control) / Constant current control (I control) /Constant voltage control (V control)
Control precision 0.5% of Maximuml power or ±1% of set point,whichever is greater
Control compensation range Constant power control, 10 to 100% of rated power value
Parallel operation Up to 6units can be controlled by master/slave communication
Interface Analog/Degital,RS-232C,RS-485
Cooling method Forced air-cooling
Dimension (WxDxH) (excluding protrusions) 483mm×630mm×133mm
Weight 29kg 36kg
Applicable standard CE / SEMI F47 / RoHS

Ambient operating temperature 5°C ~ 40°C(no condensation)
Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.
※1: The rated voltage is restricted to 650V by more than 155 kHz of frequency.
※2: The reverse time is subject to a limit at frequency more than 81kHz.

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