COMPONENTS

Top > COMPONENTS > Power Generator > Bipolar unit for dual cathode
MFU-20K

Bipolar unit for dual cathode
MFU-20K

MFU-20K

MFU-20K is a unit which converts the DC output into bipolar pulse output, by adding to ULVAC DC power generator (DPG series). It contributes to improved productivity and throughput at low cost.

Features

・Wide frequency range
Can be operated from 10k ~ 100kHz ※1

・Enables the larger capacity by a master/slave connection
 Parallel operation of maximum six MFU-20K is possible.

・DC output is possible
It is possible to apply an output of input DC power generator to a cathode directly. ※2

Applications

・ Reactive sputtering equipment for FPD

・ Reactive sputtering equipment for industrial coating

・ Reactive sputtering equipment for color TFT

・ All sputtering equipment

 

Specifications

Data download

To download drawing data and I / O data, advance user registration (free) is required.
Those who do not have user registration please register from the user registration page.