In the reactive sputtering processes, the A2K series abnormal discharge prevention unit applies positive voltage pulses to a DC power generator to neutralize the charge on the target.
This unit can be easily mounted to existing equipment, and it achieves improvements in yield ratio and throughput at low cost.
*1: Can be connected to ULVAC DPG Series DC power supplies
*2: Pulse synchronization and parallel operation is not possible when using mixed A2KH-25,50 and A2K-20K, 40K units
*3: The A2KH-25/50 requires an external synchronization unit (PHSM/PHSS)
*4: The A2K-20K/40K is only capable of in-phase phase control
■Application: Pulse synchronization system
When cathodes are close in the same chamber and they are opposite of each other or when there is interference in the discharge of multiple A2K units, the A2K inversion pulse can be set to in-phase or reverse phase by using the phase control function to prevent discharge interference. *3 *4
|Input||AC90 to 110V||AC100 to 240V|
|Frequency||Single phase 50/60Hz|
|Leak current||1mA or less|
|operating voltage||-100 to -800V|
|operating current||0 to 25A||0 to 50A||0 to 50A||0 to 100A|
|Input structure||Connector connection||Terminal block or
|Pulse range||5μs/10μs ( Internal switch switching )||1 to 18μs (There is a frequency limitation)|
|Pulse range 5μs：2,5,10,15,20kHz
Pulse range 10μs：1, 2.5, 5, 7.5,10kHz
|1 to 50KHz
Variable in 1KHz increments
|10 to 20% of the DC power generator output voltages. ( It depends on a load impedance )|
|Parallel operation||Nothing||Up to 6units can be controlled*5|
|Cooling method||Forced air-cooling|
Ambient operating temperature 5°C to 40°C (no condensation)
Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.
*5：A2K-20K and A2K-40K cannot be used together.