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A2K Series

Active Arc Killer
A2K Series

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A2K

In the reactive sputtering processes, the A2K series abnormal discharge prevention unit applies positive voltage pulses to a DC power generator to neutralize the charge on the target.
This unit can be easily mounted to existing equipment, and it achieves improvements in yield ratio and throughput at low cost.

Features

  • High throughput
    Makes high power input possible by reducing abnormal
  • Reduces substrate damage
    Capable of reducing substrate damage caused by arcs
  • Inhibits substrate temperature
    Capable of inhibiting substrate temperature compared to RF sputtering
  • Simple connectivity
    Can be easily connected to existing equipment *1
  • Variable inversion pulse frequency
    Possible range: A2KH-25/50:1kHz to 20kHz, A2K-20K/40K:1kHz to 50kHz
  • Pulse synchronization system
    Output pulses for multiple A2K units can be synchronized *2 *3
  • Capable of large capacities through master/slave connections
    Up to six A2K-20K/40K units can operate in parallel

 

*1: Can be connected to ULVAC DPG Series DC power supplies
*2: Pulse synchronization and parallel operation is not possible when using mixed A2KH-25,50 and A2K-20K, 40K units
*3: The A2KH-25/50 requires an external synchronization unit (PHSM/PHSS)
*4: The A2K-20K/40K is only capable of in-phase phase control

 

■Application: Pulse synchronization system

Pulse synchronization system

When cathodes are close in the same chamber and they are opposite of each other or when there is interference in the discharge of multiple A2K units, the A2K inversion pulse can be set to in-phase or reverse phase by using the phase control function to prevent discharge interference. *3 *4

Applications

  • Reactive sputtering equipment for FPD
  • Reactive sputtering equipment for industrial coating
  • Reactive sputtering equipment for color TFT

Specifications

Model A2KH-25 A2KH-50 A2K-20K A2K-40K
Control power
input
Input AC90 to 110V AC100 to 240V
Frequency Single phase 50/60Hz
Power 100VA 120VA 400VA
Leak current 1mA or less
Input
specification
operating voltage -100 to -800V
operating current 0 to 25A 0 to 50A 0 to 50A 0 to 100A
Input structure Connector connection Terminal block or
connector connection
Connector connection
Output
specification
Pulse range 5μs/10μs ( Internal switch switching ) 1 to 18μs (There is a frequency limitation)
Oscillating
frequency
Pulse range 5μs2,5,10,15,20kHz
Pulse range
 10μs1, 2.5, 5, 7.5,10kHz
1 to 50KHz
Variable in 1KHz increments
Inversion
pulse voltage
10 to 20% of the DC power generator output voltages. ( It depends on a load impedance )
Withstand voltage continuous
operation
-1500Vdc
Parallel operation Nothing Up to 6units can be controlled*5
Cooling method Forced air-cooling
Dimension (WxDxH) 238×450×149mm 430×450×149mm 483×630×177mm
Weight 16kg 27kg 30kg 45kg
Applicable standard RoHs

Ambient operating temperature 5°C  to  40°C (no condensation)

Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.

*5:A2K-20K and A2K-40K cannot be used together.

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